| Gettering and Defect Engineering in Semiconductor Technology (GADEST) XII |
| ‰¿Ši F\47,201iÅžj |
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| ISBN |
ISBN10 F
ISBN13 F 978-3-908451-43-3 |
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Ed. by A. Cavallini, H. Richter, M. Kittler & S. Pizzini
(Solid State Phenomena Vols.131-133)
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Trans tech |
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| Gettering and Defect Engineering in Semiconductor Technology (GADEST) XII |
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